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PortAll and Cleanroom
Classification Standards
1st Revision - January 7, 1999
The cleanroom classification standards FS 209E
and ISO 14644-1 require specific particle count measurements and calculations to
classify the cleanliness level of a cleanroom or clean area. This paper compares
the requirements of the two cleanroom classification standards and the
implementation of the standard calculations in Particle Vision PortAll software
from Pacific Scientific Instruments. Using measurement data from Met One or
Royco particle counter instruments, the PortAll software can automatically
generate cleanroom classification results.
Introduction
Summary of FS 209E and ISO 14644-1 and -2
Airborne Particulate Cleanliness Class
Comparison
Airborne Particulate Cleanliness Classes
Required Testing
Optional Testing
Classifying a Cleanroom
Collecting Samples and Calculating a Classification Level
According to ISO 14644-1
Collecting Samples and Calculating a Classification Level
According to FS209E
Requirements for Classification Calculations Using
PortAll
The History and Future of ISO Cleanroom
Standards
ISO Cleanroom Standards
ISO TC 209 Working Groups
Sources and Links

Introduction
Federal Standard 209E has long been the only definition of cleanroom
classification levels available from a standards organization. FS209E,
Airborne Particulate Cleanliness Classes in Clean Rooms and Clean Zones,
is from the U.S. General Service Administration and approved for use by all U.S.
agencies. In the absence of an international standard, FS 209E was broadly used
internationally.
The need for a new international standard that covered more cleanroom
environmental parameters and practices led to the formation of a technical
committee of the International Standards Organization. The technical committee
is named, ironically, TC 209 Cleanrooms and Associated Controlled
Environments. The goal of TC 209 is "standardization of equipment,
facilities, and operational methods for cleanrooms and associated controlled
environments. This includes procedural limits, operational limits and testing
procedures to achieve desired attributes to minimize micro contamination."
This ISO committee will produce 10 new standards documents that relate to
cleanrooms or clean zones (described below). The first two standards have been
published: ISO 14644-1 and -2. The first document, ISO 14644-1, Cleanrooms
and associated controlled environments Part 1: Classification of airborne
particulates has been released as a final draft international standard
(FDIS). The second document, ISO 14644-2, Cleanrooms and associated
controlled environments Part 2: Testing and monitoring to prove continued
compliance with ISO 14644-1; has been released as a draft international
standard (DIS). Both are legal for use in trade.
By U.S. law, FS 209E can be superseded by new international standards. It is
expected that 209E will be in use in some industries through the next five
years, but that eventually it will be replaced globally by ISO 14644-1. Particle
Vision PortAll software performs the cleanroom classification calculations for
airborne particulate levels required by both of the U.S. and ISO standards.
The actual text of the standards must be ordered from the appropriate
standards organization (see Sources and Links). This paper gives a
general overview of the required particle count measurements given in the
standards.
Return to contents

Summary of FS 209E and ISO 14644-1 and
-2
The cleanliness classification levels defined by FS209E and ISO 14644-1
are approximately equal, except the new ISO standard uses new class
designations, a metric measure of air volume and adds three additional classes -
two cleaner than Class 10 and one beyond than Class 100,000. The second new ISO
standard, ISO 14644-2, gives requirements for monitoring a cleanroom or clean
zone to provide evidence of its continued compliance with ISO 14644-1.
The following table compares FED STD 209E to the new ISO 14644-1
classifications.
Airborne Particulate Cleanliness Class
Comparison
ISO 14644-1 |
FED STD 209E |
ISO Class |
English |
Metric |
1
|
|
|
2 |
|
|
3 |
1 |
M1.5 |
4 |
10 |
M2.5 |
5 |
100 |
M3.5 |
6 |
1,000 |
M4.5 |
7 |
10,000 |
M5.5 |
8 |
100,000 |
M6.5 |
9 |
|
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The ISO standard also requires fewer sample locations,
especially as the cleanroom/area size increases; however, the ISO standard does
require minimum one minute samples, whereas the Federal Standard allows shorter
samples, especially at smaller particle sizes.
For example, to certify an FS Class 10 cleanroom (ISO class 4), with 250
square feet (7.08 square meters), classified at 0.3 micron with a 1 cf/m flow
rate particle counter, the required number of sample locations, sample volumes,
and sample times would be as follows:
- FS209E requires 10 sample locations, 19.6 liter minimum sample volume
(0.85 cf), and a sample time of 51 seconds. This yields a total minimum
sample time of 510 seconds and 10 equipment moves.
- ISO 14644-1 requires 3 sample locations, 19.6 liter minimum sample
volume (0.85 cf ), but also a minimum sample time of one minute yielding
three samples of one cubic foot. This yields a total sample time of 180
seconds and three equipment moves.
The precise count levels required by ISO 14644-1 for each classification, by
particle size, are given below.
Airborne Particulate
Cleanliness Classes (by cubic meter)
CLASS |
Number of Particles per Cubic Meter by Micrometer
Size |
|
0.1 um |
0.2 um |
0.3 um |
0.5 um |
1 um |
5 um |
ISO 1 |
10 |
2 |
|
|
|
|
ISO 2 |
100 |
24 |
10 |
4 |
|
|
ISO 3 |
1,000 |
237 |
102 |
35 |
8 |
|
ISO 4 |
10,000 |
2,370 |
1,020 |
352 |
83 |
|
ISO 5 |
100,000 |
23,700 |
10,200 |
3,520 |
832 |
29 |
ISO 6 |
1,000,000 |
237,000 |
102,000 |
35,200 |
8,320 |
293 |
ISO 7 |
|
|
|
352,000 |
83,200 |
2,930 |
ISO 8 |
|
|
|
3,520,000 |
832,000 |
29,300 |
ISO 9 |
|
|
|
35,200,000 |
8,320,000 |
293,000 |
ISO 14644-2 determines the type and frequency of testing
required to conform with the standard. The following tables indicate which tests
are mandatory and which tests are optional.
Required Testing (ISO 14644-2)
Schedule of Tests to Demonstrate
Continuing Compliance |
Test Parameter |
Class |
Maximum Time Interval |
Test Procedure |
Particle Count Test |
<= ISO 5 |
6 Months |
ISO 14644-1 Annex A |
> ISO 5 |
12 Months |
Air Pressure Difference |
All Classes |
12 Months |
ISO 14644-1 Annex B5 |
Airflow |
All Classes |
12 Months |
ISO 14644-1 Annex
B4 |
Optional Testing (ISO 14644-2)
Schedule of Additional Optional
Tests |
Test Parameter |
Class |
Maximum Time Interval |
Test Procedure |
Installed Filter Leakage |
All Classes |
24 Months |
ISO 14644-3 Annex B6 |
Containment Leakage |
All Classes |
24 Months |
ISO 14644-3 Annex B4 |
Recovery |
All Classes |
24 Months |
ISO 14644-3 Annex B13 |
Airflow Visualization |
All Classes |
24 Months |
ISO 14644-3 Annex
B7 |
Return to contents

Classifying a Cleanroom
There are three basic steps to classifying a cleanroom using a particle
counter and Particle Vision PortAll software:
- Determine the required particle count samples, including the number of
sample locations, particle size to be used for classification, and required
sample air volume.
- Collect the sample data using the particle counter instrument. (Refer to
the instrument manual for operating instructions)
- Use PortAll to read sample data from the instrument and calculate the
cleanroom/area classification level. Save or print the results.
Although the FS and ISO standards can seem complicated, once you have
determined the required number of samples for your cleanroom/area and mapped
their locations, you will repeat the same samples at the same locations each
time you re-certify the cleanroom. PortAll software automatically performs the
calculations and gives the results. All you have to do is collect the sample
data.
Procedures for each of the standards are described below.
Collecting Samples
and Calculating a Classification Level According to ISO 14644-1
Basically, the ISO requirements are as follows:
- Mininum number of sample locations is the square root of the number of
square meters of floor space in the cleanroom/area
- samples must be at least one minute and two liters (less than 0.1 cubic
foot)
- ISO-required variations in calculations based on the number of locations
are automatically handled by PortAll (i.e. two-nine locations require a UCL
to be used)
Detailed step-by-step descriptions of the requirements are given below.
To determine the number and type of particle count samples for your
cleanroom/area required by the ISO standard, the following basic information is
needed:
|
Basic Information
|
Used for determining
|
1 |
Size of the clean area in square meters or square feet (convert to
square meters) |
a. Minimum number of sample points
b. If a UCL calculation is required (PortAll automatically determines
this and performs UCL calculation) |
2 |
Intended ISO Class and particle size(s) for test |
minimum sample volume |
1. The minimum number of sample points is calculated as
follows:
- determining the size of the floor area, in square meters
- take the square root of the floor area
- round up the value of the square root to the next
integer
2. The minimum sample volume at each point is obtained as
follows:
- an absolute minimum of 2 liters (about 0.071 cubic feet, 0.002 cubic
meters), or
- a minimum volume calculated by the following equation:
Vs = ( 20 / Cn,m ) x 1000
Where : Vs is the minimum sample volume, in liters
Cn,m is the class limit (in number of particles per cubic meter
for a given particle size)
Note: if you intend to calculate the class level at multiple particle
sizes, be sure to select a sample volume for the largest size, which is also the
largest required volume. This will ensure the sample data is valid for all
sizes.
3. The minimum sample time at each location must be one minute or
greater.
4. There is no definition of the number of samples to be taken at each sample
point except in the case when there is only one sample point. For one sample
point, there must be at least three sample volumes taken.
Note: PortAll software requires at least two locations to perform
classification calculations, making the last requirement
irrelavent.
Once the samples have been collected, connect the particle counter to the
PortAll computer's serial port and the software will read the data from the
particle counter memory and display the data in a spreadsheet. Select the sample
count values to be used in the classification calculation. (The classification
level can only be calculated for one particle size at a time.) Click the ISO
calculator icon to perform the classification calculations.
The resulting classification for the selected particle size is displayed at
the bottom of the sample data for that size column on the spreadsheet.
Per the ISO standard, if the number of sample locations is greater than 10
and more than one sample was collected per location, then the classification is
determined by the averages of the particle counts obtained at each location. The
calculated average at each location must pass the classification
limit.
If the number of sample locations is at least two but not more than nine,
then the Upper Confidence Limit [UCL] will also be calculated, and the
calculated value for the UCL must also be less than the classification
limit.
Collecting Samples and Calculating a
Classification Level According to FS209E
Basically, the Federal requirements are as follows:
- in areas with unidirectional flow, there must be one sample location for
each 25 square feet of floor space or for each 2.32 square meters
- samples must be at least 2.83 liters (0.1 cubic foot)
- at least five samples must be collected
- FS-required variations in calculations based on the number of locations
are automatically handled by PortAll (i.e. two-nine locations require a UCL
to be used)
Detailed step-by-step descriptions of the requirements are given below.
To determine the number and type of particle count samples for your
cleanroom/area required by the Federal Standard, the following basic information
is needed:
|
Basic Information
|
Used for determining
|
1 |
Airflow: Unidirectional or turbulent |
which factor to use for calculating number of sample
points |
2 |
Size of the clean area in square meters or square feet |
a. minimum number of sample points
b. If a UCL calculation is required (PortAll automatically determines
this and performs UCL calculation) |
3 |
Intended Cleanroom Class; particle size(s) for test |
minimum sample volume |
1.The minimum number of sample locations varies based on the flow type.
A) For unidirectional flow, the minimum number of locations is calculated
by:
- determining the size of the floor area, in square meters, and dividing
by 2.32
- or, determining the size of the floor area, in square feet, and
dividing by 25
- rounding up the value of the calculation to the next integer (minimum
= 2)
B) For non-directional flow, the minimum number of sample locations is
calculated by:
- determining the size of the floor area, in square meters, and using
the formula
Ns = (area in square meters) x 64 /
(10M)0.5
where Ns = number of sample locations
M = SI (Metric) designation of the room class
- or, determining the size of the floor area, in square feet, and using
the formula
Ns = (area in square feet) / (NC)0.5
where Ns = number of sample locations
Nc = room class
designation in English units
- rounding up the value of Ns to the next integer (minimum =
2)
2. The minimum sample volume at each point is obtained by the larger
of:
- an absolute minimum of 2.83 liters (e.g. 0.1 cf), or
- a minimum volume calculated by the following equation:
Vs = (20 / Cn,m )x 1000
Where Vs is the minimum sample volume, in liters
Cn,m is the class limit (in number of particles per cubic
meter)
3. There is no minimum sample time at each location.
4. There is no definition of the number of samples to be taken at each sample
point except that at least five sample volumes must be taken in each
cleanroom/area being classified.
Once the samples have been collected, connect the particle counter to the
PortAll computer's serial port and the software will read the data from the
particle counter memory and display the data in a spreadsheet. Select the sample
count values to be used in the classification calculation. (The classification
level can only be calculated for one particle size at a time.) Click the FS209
calculator icon to perform the classification calculations.
The resulting classification for the selected particle size is displayed at
the bottom of the sample data for that size column on the spreadsheet.
Per the FS209E standard, if the number of sample locations is greater than 10
and more than one sample was collected per location, then the classification is
determined by the averages of the particle counts obtained at each location. The
calculated average at each location must pass the classification
limit.
If the number of sample locations is at least two but not more than nine,
then the Upper Confidence Limit [UCL] will also be calculated, and the
calculated value for the UCL must also be less than the classification
limit.
Return to contents

Requirements for Classification Calculations Using
PortAll
Once you have selected the count values in the spreadsheet for the
particle size you want used for the classification calculation, PortAll
calculates the class as follows:
PortAll searches the unselected region of the spreadsheet and determines the
number of sample locations involved. The software then sorts the samples by
location and determines the average count value per location. The highest
average count value is determined and this value is compared to the standard
table to determine the classification. If there are between two and nine
locations, PortAll also calculates the UCL and compares the result to the
standard table. The UCL result and average count result are compared and the
worst classification is chosen.
The following four rules must be followed to ensure an accurate
classification result from PortAll.
- The data returned from the particle counter contains a location number for
each sample. The operator collecting the sample data must change the location
number, using the front panel instrument controls, each time the instrument is
moved to a new location. PortAll relies on the location number as an accurate
indicator of the number of sample locations, and number of samples per
location.
- The sample time must be set to obtain the required sample volume at each
location. (Sample Time x Instrument Flow Rate = Sample Volume). PortAll does
not have access to the instrument flow rate and has no way to verify that the
sample volume complies with standard requirements.
- The total count data returned from the particle counter must be normalized
to counts per unit volume to obtain a correct classification. PortAll will
automatically normalize the count data, but you must setup this feature (refer
to the online User's Guide for instructions). The data normalization
settings for a particular instrument are saved based on the instrument
address. For most instruments, the sample location (LOC) value is also the
serial port address, so be sure to reset the instrument address after
collecting samples in the cleanroom and before connecting the instrument to
PortAll. Otherwise, the count values will not be automatically normalized and
an erroneous classification could result. Also, the address value cannot
esceed 31. PortAll will not recognize an instrument whose address is outside
of the rante of 0-31.
- For ISO 14644-1: PortAll stores the ISO classification limits internally
in a table as counts per cubic meter. To obtain accurate classifications,
the data in the spreadsheet must be normalized to counts per cubic meter.
- For FS209E: PortAll stores the FS209E classification limits as counts
per cubic foot. To obtain accurate classifications, the data in the
spreadsheet must be normalized to counts per cubic foot.
Note: Sometimes it is helpful to clear the instrument memory before
beginning a sampling sequence to classify a cleanroom/area. This ensures that
the PortAll spreadsheet of the instrument memory will only contain relevant
samples, making it easier to select which data should be used for the
classification calculations.
Return to contents

The History and Future of ISO Cleanroom
Standards
In 1992, at the urging of the Institute of Environmental Sciences, the
American National Standards Institute petitioned ISO to create a technical
committee on cleanrooms and associated controlled environments. This new
committee, ISO TC 209, was formally established in May 1993. Its mission is to
develop an international standard for cleanrooms and associated controlled
environments that encompasses the standardization of equipment, facilities, and
operational methods, while also defining procedural and operational limits and
testing procedures to minimize contamination.
Thirty-four countries are currently active in ISO TC 209. Voting members are
Australia, Belgium, China, Denmark, Finland, France, Germany, Italy, Jamaica,
Japan, Korea, The Netherlands, Norway, Portugal, Russia, Sweden, Switzerland,
the United Kingdom, and the United States. Nonvoting members are Bulgaria, the
Czech Republic, Egypt, India, Ireland, Malaysia, New Zealand, the Philippines,
Poland, Saudi Arabia, South Africa, Thailand, Turkey, Ukraine, and Yugoslavia.
Two Draft International Standards (DIS) have been released by the committee:
ISO/DIS 14644-1, Cleanrooms and associated controlled environments-Part 1:
Classification of airborne particulates, and ISO/DIS 14644-2 Cleanrooms
and associated controlled environments-Part 2: Specifications for testing
and monitoring to prove continued compliance with ISO 14644-1. These first
ISO cleanroom standards are two of 10 documents (see table A) that will make up
the new family of global cleanroom standards. Many of these documents are at the
final voting stage and can be legally used in trade.
ISO Document |
Title |
ISO-14644-1 |
Classification of Air Cleanliness |
ISO-14644-2 |
Cleanroom Testing for Compliance |
ISO-14644-3 |
Methods for Evaluating & Measuring Cleanrooms & Associated
Controlled Environments |
ISO-14644-4 |
Cleanroom Design & Construction |
ISO-14644-5 |
Cleanroom Operations |
ISO-14644-6 |
Terms, Definitions & Units |
ISO-14644-7 |
Enhanced Clean Devices |
ISO-14644-8 |
Molecular Contamination |
ISO-14698-1 |
Biocontamination: Control General Principles |
ISO-14698-2 |
Biocontamination: Evaluation & Interpretation of
Data |
ISO-14698-3 |
Biocontamination: Methodology for Measuring Efficiency of Cleaning
Inert Surfaces |
ISO
Cleanroom Standards
ISO/FDIS 14644-1 Classification of Air Cleanliness This document covers
the classification of air cleanliness in cleanrooms and associated controlled
environments. Classification in accordance with this standard is specified and
accomplished exclusively in terms of concentration of airborne particles.
ISO/DIS 14644-2 Cleanroom Testing for Compliance This document specifies
requirements for periodic testing of a cleanroom or clean zone to prove its
continued compliance with ISO 14644-1 for the designated classification of
airborne particulate cleanliness. These requirements invoke the test described
in ISO 14644-1 for the classification of the cleanroom or clean zone. Additional
tests are also specified, to be carried out based on the requirements of this
International Standard. Optional tests, to be applied at the user's discretion,
are also identified.
ISO-14644-3 Methods for Evaluating & Measuring Cleanrooms &
Associated Controlled Environments
This document describes the necessary performance tests for various types of
cleanrooms. The occupancy states of "as built", "at rest", and "in operation"
are defined as well as appropriate levels of certification. A large index is
provided on a variety of test methods and appropriate equipment.
ISO-14644-4 Cleanroom Design & Construction
This document will be a primer on the design and construction of cleanrooms.
It will cover all aspects of the process from design development to startup and
commissioning.
ISO-14644-5 Cleanroom Operations
This document will be a primer on cleanroom operation. It will cover all
aspects of the operation of a cleanroom including entry and exit procedures for
equipment and personnel, education and training, cleanroom apparel, and facility
issues such as maintenance, housekeeping, monitoring, system failure, etc.
ISO-14644-6 Terms, Definitions & Units
This document will provide a consistent reference for all terms, definitions
and units discussed across all ISO cleanroom standards.
ISO-14644-7 Enhanced Clean Devices
This document will focus on specialized stand-alone clean spaces including
their design, construction, and operations.
ISO-14644-8 Molecular Contamination
This will be a new document covering measurement of airborne molecular
contamination in clean zones. The first meeting is scheduled for December
1998.
ISO-14698-1 Biocontamination: Control General Principles
This document describes principles and basic methodology for a formal system
to assess and control biocontamination where cleanroom technology is
applied.
ISO-14698-2 Biocontamination: Evaluation & Interpretation of Data
This document describes basic principles and methodology for microbiological
data evaluation. It provides a method of estimating of biocontamination from
sampling for viable particles in zones at risk.
ISO-14698-3 Biocontamination: Methodology for Measuring Efficiency of
Cleaning Inert Surfaces
This document outlines the methodology to measure the effectiveness of
cleaning and/or disinfection of inert surfaces having biocontaminated wet
soiling or biofilms.
ISO
TC 209 Working Groups
Listed below are ISO TC 209's seven working groups and their missions.
Working Group 1
ISO 14644-1, "Classification of Air Cleanliness" Three new classes have been
added to the existing standard, Federal Standard 209, two cleaner and one
dirtier.
ISO 14644-2 covers specifications for testing and monitoring. This document
specifies the requirements for monitoring a cleanroom or clean zone to provide
evidence of its continued compliance with ISO 14644-1 for the designated
classification of airborne particulate cleanliness. A schedule of normative and
informative tests is included in the document.
Working Group 2
ISO 14698-1, "Biocontamination Control General Principles". This document
describes the principles and basic methodology for a formal system to assess and
control biocontamination. It will include the general requirements of a sampling
plan; target, alert, and action levels; qualification; and reporting.
ISO 14698-2, "Evaluation and Interpretation of Biocontamination Data." This
document describes the basic principles and methodological requirements for all
microbiological data evaluation and the estimation of biocontamination data
obtained from sampling for viable particles. It will also include evaluation of
the initial monitoring plan and of the data resulting from routine monitoring,
as well as analysis of the data, trending, and record keeping.
Working Group 3
A working group on metrology and testing methods. Performance tests are
specified at operational phases—as-built, at-rest, and operational. The items to
be measured are categorized as either primary or user-optional tests. Primary
tests include particle count, airflow velocity, airflow volume, pressure
differential, and installed filter leakage. User-optional tests include flow
visualization, airflow parallelism, airflow turbulence, temperature, humidity,
molecule contamination, electrostatic charge, particle fallout, recovery, and
integrity.
Working Group 4
ISO 14644-4, "Design and Construction." This document specifies requirements
for the design and construction of cleanroom and clean air devices, as well as
requirements for start-up and qualification. It also provides guidance on the
basic elements of design and construction.
Working Group 5
A cleanroom operations working group. Topics to be addressed include
entry/admittance, procedures, and cleaning, as well as maintenance as it relates
to equipment, materials, and people.
Working Group 6
In detailing terms, definitions, and units, the definitive document of this
working group must include all definitions from all approved documents of ISO TC
209. Consequently, it will be the final ISO TC 209 document.
Working Group 7
The Enhanced Clean Devices working group.
Return to contents
Sources and Links
Institute of Environmental Sciences & Technology
(IEST)
940 East Northwest Highway
Mt. Prospect, IL 60059
Phone: 1-847-255-1561
Fax: 1-847-255-1699
- FS 209E from the General Services Adminstration. Order from . . .
Standards Order Desk Naval Publications and Forms Center 700 Robbins
Ave Section D BLD4 Philadelphia, PA. 19111 Tel # 215-697-2667 FAX
215-697-2978
Return to contents
Document P/N 2084056
Written by Scott Hjelmervik, Software and Systems Manager, and by Joe Gecsey,
Airborne Products Manager
Copyright by Pacific Scientific Instruments Company, January 1999. All Rights
Reserved. Specifications subject to change without notice
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